MEMS Flow Sensor
Product Number : D6F-20A5-000
The D6F is built for use with general-purpose devices. In particular, when using the D6F for applications with the safety requirements described below, take steps to ensure system and device safety through measures such as fail-safe designs, redundant designs, and regular inspections.
•Safety devices for ensuring safety for persons
•Transportation equipment control (such as applications to stop operation)
•Aviation and space equipment
•Nuclear power equipment
Do not use the D6F for applications in which D6F operation would directly affect human life.
Transportation equipment control
Nuclear power equipment
High-accuracy Sensing with a Compact Body for Flow Rates Up to 50 L/min.
Accurately detects a mass flow rate of 10 to 50 L/min.
A compact size of 30 ✕ 78 ✕ 30 mm (H ✕ W ✕ D).
High Flow Rates