MEMS Flow Rate Sensor
Product Number : D6F-W10A1
The D6F is built for use with general-purpose devices. In particular, when using the D6F for applications with the safety requirements described below, take steps to ensure system and device safety through measures such as fail-safe designs, redundant designs, and regular inspections.
•Safety devices for ensuring safety for persons
•Transportation equipment control (such as applications to stop operation)
•Aviation and space equipment
•Nuclear power equipment
Do not use the D6F for applications in which D6F operation would directly affect human life.
Nuclear power equipment
A Compact Sensor That Uses
OMRON's Unique Flow Path Structure
for High-performance Flow Rate
Anti-dust performance enhanced by OMRON's
unique three-dimensional flow path structure.
High accuracy of ±5% FS.
High Flow Rates