MSP Corp (A Division of TSI Incorporated)

MSP is a privately-held division of TSI Inc. MSP Corporation is an applied aerosol technology instrumentation and equipment company creating products for scientific research and industrial applications. We are known world-wide for our expertise in micro- and nano-particle generation, measurement and control in research and manufacturing. Our products are designed for aerosol research, pharmaceutical inhaler testing, chemical vapor deposition and atomic layer deposition processes in semiconductor device fabrication, calibration of silicon wafer and photomask surface scanning inspection systems in semiconductor metrology, and contamination control applications.