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Registration Date	13 May 2016
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NanoSensor for the ultimate in position monitoring

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Electronics Sensor Product Number : NXD1-AL

Sensor

Applications

Precision manufacturing Metrology Deformation measurements Stain measurement (used on space station robotic arm and hand) Stage control Materials testing Microscopy Active Optics Precision Beam Steering

Metrology Stain measurement Deformation measurements Stage control Materials testing Microscopy Active Optics Precision Beam Steering

Properties

Sub-nanometer position resolution Zero hysteresis Linearity error down to 0.02% Bandwidth up to 10 kHz High thermal stability construction (Super invar, zerdur and ceramic options available) UHV, Radiation, Cryogenic, Nonmagnetic, etc. Variants

Thermal stability Zero Hysteresis

Manufacturer's Description

The NanoSensor® is a non-contact position measuring system based on the principle of capacitance micrometry. Two sensor plates, a Target and a Probe, form a parallel plate capacitor.

The spacing of these two plates can be measured using the appropriate electronic controller, to better than 7pm, with a range up to 1.25mm, a frequency response up to 10KHz and linearity down to 0.02%. Because the NanoSensor is a non-contact method, it is free from hysteresis. No power is dissipated at the point of measurement.