Electronics Sensor Product Number : NMH200Sensor
Zinc OxideZnO Nanowire CAS Number : 1314-13-2
Suspended Platinum structure on a silicon substrate. Sandwiched between films of silicon dioxide and silicon nitride. Acts like a hot plate due to resistive heating. Comes with an Integrated temperature sensor. Zinc Oxide nanowires are grown on the silicon membrane.They are absorb moisture and increase the sensing surface area. The thickness of the micro heater is 1 μm The width of the platinum coil structure is 10 μm
NHM200 is a Micro Heater with an integrated temperature sensor. It consists of two suspended and interdigitated platinum coils, viz. Heater and Sensor. The low thermal mass of the heater coil allows for high speed heating and cooling within a few milliseconds. Temperature is sensed by the sensor coil whose resistance increases with temperature in a known and repeatable way. It exhibits very high accuracy over a wide range of temperatures.