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Registration Date	23 May 2016
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Micro Heater-NMH200

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Electronics Sensor Product Number : NMH200

Sensor

Nanomaterials

Manufacturer Asserted

Zinc Oxide

ZnO Nanowire CAS Number : 1314-13-2

Applications

Gas Sensors/ Air Quality control Temperature Sensing Heating element in micro and nano-scale sensing experiments Bio MEMS/ DNA Analysis Micro-Solid Oxide Fuel Cells in portable power storage and delivery Homeland security Automotive Exhaust Gas sensors Micro Propulsion systems

Gas sensor Air Quality control Temperature Sensing Bio MEMS DNA Analysis Homeland security Micro Propulsion systems

Properties

Suspended Platinum structure on a silicon substrate. Sandwiched between films of silicon dioxide and silicon nitride. Acts like a hot plate due to resistive heating. Comes with an Integrated temperature sensor. Zinc Oxide nanowires are grown on the silicon membrane.They are absorb moisture and increase the sensing surface area. The thickness of the micro heater is 1 μm The width of the platinum coil structure is 10 μm

Manufacturer's Description

NHM200 is a Micro Heater with an integrated temperature sensor. It consists of two suspended and interdigitated platinum coils, viz. Heater and Sensor. The low thermal mass of the heater coil allows for high speed heating and cooling within a few milliseconds. Temperature is sensed by the sensor coil whose resistance increases with temperature in a known and repeatable way. It exhibits very high accuracy over a wide range of temperatures.