Registration Date 23 May 2016



Electronics Sensor



Analysis: Study the chemical interaction of Volatile Organic Compounds and Gases with coated reagents. Analyze chemical kinetics, reactivity and other characteristics under different environmental conditions. Detection: Design and Develop MEMS sensors. Study the interaction of target molecules with various coatings to determine sensitivity and selectivity. Characterization: Characterize the response of the MEMS sensors. Modify and report change in various physical parameters such as temperature, flow rate etc. Education: Educate students on the basics of MEMS technologies and cantilever sensors. Perform lab experiments with the help of user guides, lab manuals and encourage students to experiment on their own. Product Exploration: Develop new products around the Cantilever platform. Use this fast and easy setup to characterize the chemical response of sensors and demonstrate a proof of concept.
Gas sensor Chemical sensing MEMS


Channels: Study Up To 4 individual cantilever. Auto channel detect: Detects number of active cantilever channels available Auto calibration feature for seamless calibration Gas Flow: Integrated Mass Flow Controller for configurable flow rates 1-100m1/min(Default calibrated for N2) Can be custom calibrated for other carrier gases. Automatic Valve Control for Carrier Gas and Head Space Analyte Temperature Control: Individual temperature set and control for Cantilever Reaction Chamber and Vial for Head-Space Gases Resolution: 0.1 C Range: Room Temp to 80 C Operation Modes: Full Featured PC User Interface Mode using PC Software Stand Alone Mode through On-System Graphical Display and Buttons Display: Full fledged graphical display for stand alone mode Large Format 5.7″ LCD Screen Real Time Graphs for all channels On Screen display of Temperatures and Flow Rate User Interface: One Touch Experiment Start/Stop One Touch Channel Enable/Disable for Individual Cantilever Channels One Touch Valve Control for Carrier Gas and Analyte Individual dedicated buttons for setting temperatures and flow rate Data Logging and Memory: Internal Memory for logging experiment data and activity logs Save upto 40 hours of experiment data Logs available in CSV format through USB interface software PC Software: USB based PC User Interface Software Windows XP / Windows 7 Compatible Real-time Graphs and System Parameters Complete Instrument Control including setting of parameters View, Download and Erase Experiments Download experiment data in CSV(Comma Separated Values) format for analysis and interpretation One Touch Screen Snapshot

Manufacturer's Description

A Piezoresistive MEMS Cantilever based Experimentation Platform for Vapour Phase Analysis of Volatile Organic Compounds and Gases .It comprises an Analyte Chamber, a Detection Chamber, Mass Flow Controllers along with multi-channel real-time graphical display, data logging and PC software

  • Diving board like structure.
  • Deflects both upwards and downwards due to compressive and tensile stresses leading to strain in the whole structure.
  • Piezo-Resistive structure enables measurement of strain in the form of change in resis-tance between two conducting points at the base of the cantilever.
  • Therefore, the Piezo-Resistive MEMS Cantilever is capable of transducing a nano-mechanical motion into an electrical signal.
  • A Vial in the Analyte Chamber houses the target compound to be detected (as a liquid)
  •  This target solution is heated to generate it’s vapours
  •  There is a Detection Chamber where the MEMS Cantilever is housed.
  • The surface of the Cantilever is functionalized with a compound having affinity for the target compound
  •  The vapours of the target compound are carried to the Detection Chamber using Mass Flow Controllers and a Carrier Gas (Nitrogen– as it is inert)
  • Here, the MEMS Cantilever is exposed to the target vapours
  •  Due to the affinity between the target vapours and surface functionalized cantilever, physical adsorption/chemical binding takes place on the surface of the cantilever. This causes a change in surface stress leading to a deflection of the Cantilever. This nanomechanical deflection leads to a strain in embedded piezoresistive, which in turn causes a change in the resistance of the Cantilever.
  •  Once the flow of target vapours is stopped, the cantilever goes back to its original state and it’s resistance returns to the original value
  •  This interaction between the Cantilever and the target vapours is seen real-time on the display as a plot of Resistance v/s Time