Registration Date 23 May 2016



Electronics Sensor



Design and Develop a MEMS based sensor for chemical/gas/flow detection. Study and Analyze the response of the MEMS heater sensor due to various types of electrical excitation and understand their significance from productization point of view. Set Up a MEMS and Sensor laboratory and encourage students to perform experiments, undertake projects and publish research papers. Perform various nano-scale heating and sensing experiments with microheaters.
Gas sensor Chemical sensing MEMS


Micro Heater Instrumentation System with Electrical readout. Real time display (3.5”)and data logging. Compact Table Top devices, no bulky instrumentation required. Operation Mode: Standalone and PC. Easy Plug and Play operation. Results can be analyzed with our software.

Manufacturer's Description

A desktop experimentation and research platform to drive, control and monitor Microheaters, and to record and analyze their thermal response.  It comprises a Microheater and associated electronics, Software to define Electrical Excitation and to observe the corresponding response of the Microheater.

Platinum based Microheater with integrated temperature sensor

  • Micro-structures(coil) in platinum that can be heated from room temperature to several hundreds of degree Celsius within a few milliseconds.
  • The heater coil is sandwiched between layers of silicon dioxide and silicon nitride.
  • This sandwiched membrane is suspended on a silicon substrate and acts like a hot plate when connected to a power source due to resistive heating.
  • There is a thermally coupled RTD which acts as an integrated temperature sensor for in-situ temperature measurement/sensing.
  • The Microheater is given an electrical excitation in the form of standard input signals like sine, square, triangular, etc. or user-defined inputs
  •  This excitation causes the heater to ramp up to several tens and hundreds of degrees with a characteristic thermal profile that depends on the type of input .
  •  The thermal profile can be seen as a graph of Temperature vs Time
  •  The rise and fall times to different input signals can be analyzed
  •  Each PCB comes with 2 Microheaters to enable carrying out differential measurements
  •  Experiments can be performed to study the effect of addition of thermal mass on the thermal response of the Microheater