MEMS Flow Sensor

The D6F is built for use with general-purpose devices. In particular, when using the D6F for applications with the safety requirements described below, take steps to ensure system and device safety through measures such as fail-safe designs, redundant designs, and regular inspections. •Safety devices for ensuring safety for persons •Transportation equipment control (such as applications to stop operation) •Aviation and space equipment •Nuclear power equipment Do not use the D6F for applications in which D6F operation would directly affect human life.

A Compact, High-accuracy Sensor That Measures Low Flow Rates. High accuracy of ±3% FS. Flow rates can be measured without being affected by temperature or pressure.