"1. Detects defects in LowContrast using a powerful program that detects defects.
2. The use of high-performance defect measurement procedures more accurate measurement of defect size.
3. Eliminate the dust on the surface of the BLU by removing dust from the surface of the BLU. This will only detect the defects.
4. Support 1/2/4/8 multi-chip simultaneous inspection
5. Support the connection with the production management system"