Registration Date 1 Aug 2017

Prober Shuttle (PS8)


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Prober Shuttle


Compact & flexible Small and practical Plug-and-play system with modular components Interfacing solutions for most SEM/FIB instruments (including load-lock compatibility) Fast setup and removal Pioneering cabling technology Clear & simple Intuitive control interfaces and software User-friendly and easy to learn Quick and easy probe tip exchange Compact, stand-alone electronics Effortless work with multiple manipulators Robust & stable Excellent stability Low drift (1 nm/min) Reliable operation (one year endurance test) Virtually insusceptible to vibrations Fast pre-positioning by hand Fast & precise High operating velocity (up to 10 mm/sec) Sub-nanometer resolution (0.25 nm) No backlash or reversal play Extensive working range Coarse and fine displacement in one drive

High operating velocity

Manufacturer's Description

The Prober Shuttle is our latest tool for high-precision in-situ electrical nanoprobing on the 14 nm technology node - and beyond! In order to realise our vision for this product, we developed an ultra-flat three-axis manipulator with unmatched stability and precision - the MM4. The Prober Shuttle can be comprised of up to eight MM4s with the option of an ultra-flat two-axis or three-axis substage.
The entire height of the system is 10 mm, making it compatible with a wide range of SEM load-locks and thus helping you to achieve a higher sample throughput. The Prober Shuttle also offers low-current, low-capacity measurement capability and is fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current imaging modules.
Total height: 10 mmTotal width: 140 mmMaximum sample size: 20 mm — 20 mm — 1 mmWeight: 200 g + SEM/FIB dovetailNext generation micromanipulators
A = left / right    B = up / down    C = in / out
Operating range: A = 7 mm, B = 90°, C = 5 mmResolution: A = < 0.5 nm, B = 9 nm, C = < 0.5 nmLow drift: 1 nm/minLow-capacity, low-current measurements
Noise: 25 fA @ 1 HzInsulation leakage current: <50 fA/VSignal conductor resistance: <5 ΩMaximum voltage: 100 VMaximum current: 100 mA