|Kleindiek Nanotechnik GmbH|
Others Other productsProber Shuttle
Compact & flexible Small and practical Plug-and-play system with modular components Interfacing solutions for most SEM/FIB instruments (including load-lock compatibility) Fast setup and removal Pioneering cabling technology Clear & simple Intuitive control interfaces and software User-friendly and easy to learn Quick and easy probe tip exchange Compact, stand-alone electronics Effortless work with multiple manipulators Robust & stable Excellent stability Low drift (1 nm/min) Reliable operation (one year endurance test) Virtually insusceptible to vibrations Fast pre-positioning by hand Fast & precise High operating velocity (up to 10 mm/sec) Sub-nanometer resolution (0.25 nm) No backlash or reversal play Extensive working range Coarse and fine displacement in one drive
The Prober Shuttle is our latest tool for high-precision in-situ electrical nanoprobing on the 14 nm technology node - and beyond! In order to realise our vision for this product, we developed an ultra-flat three-axis manipulator with unmatched stability and precision - the MM4. The Prober Shuttle can be comprised of up to eight MM4s with the option of an ultra-flat two-axis or three-axis substage.
The entire height of the system is 10 mm, making it compatible with a wide range of SEM load-locks and thus helping you to achieve a higher sample throughput. The Prober Shuttle also offers low-current, low-capacity measurement capability and is fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current imaging modules.
Total height: 10 mmTotal width: 140 mmMaximum sample size: 20 mm — 20 mm — 1 mmWeight: 200 g + SEM/FIB dovetailNext generation micromanipulators
A = left / right B = up / down C = in / out
Operating range: A = 7 mm, B = 90°, C = 5 mmResolution: A = < 0.5 nm, B = 9 nm, C = < 0.5 nmLow drift: 1 nm/minLow-capacity, low-current measurements
Noise: 25 fA @ 1 HzInsulation leakage current: <50 fA/VSignal conductor resistance: <5 ΩMaximum voltage: 100 VMaximum current: 100 mA