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Registration Date 1 Aug 2017
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LayTec Flames

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Others Electronics and Appliances

metrology system

Applications

Multi-layer thin-film structures Layer thickness measurement Reflectance measurement Transmittance uniformity measurement

Manufacturer's Description

LayTec Flames is a multi-head optical metrology system for monitoring multi-layer thin-film structures in large area processes. It measures multi-traces of layer thickness, reflectance, and transmittance uniformity directly after the deposition in in-line processes with thickness resolutions down to less than  1 nm. Typical applications are functional layers in display industries, foil coating (roll-to-roll), and glass coatings. Flames is suitable for nearly any thin-film production line. With its contact-free optical approach it measures close to the process and allows closed-loop control of layer deposition and etching. With LayTec Flames you get homogeneity information of layers at the tact rate of your line, directly after processing, complete with statistical analysis. You can apply quality thresholds and alarms for fast reaction of operators.